The NPS-XY-100A is a piezo scanned flexure guided nanopositioning stage with integrated capacitance position sensors. It is made of Super Invar and is capable of sub-nanometer resolution and ...

The piezo stages offer optional closed-loop feedback using a capacitive sensor design for sub-nanometer resolution and high linearity. Specifications include resolution to 0.15 nm, linearity to 0.007% ...

Depending upon the distance between the surface of a capacitance probe and a target source, the electrical capacitance that is formed between these two objects will vary. In an effort to improve ...

Non-contact displacement measurements can be made rapidly and with high precision using capacitive sensors over a modest range. The main features are: Capacitive sensing is a non-contact measurement ...

Micro- and nanomechanical sensing is widely used in atomic force microscopy (AFM) nanocharacterization 1, biosensing 2,3, mechanical property measurements 4, and force 5,6 and mass sensing 7,8,9. The ...