Metrology supplier Nanometrics Inc. today unveiled an integrated metrology tool combining ultraviolet spectroscopic ellipsometry and deep ultraviolet (DUV) spectroscopic reflectometry. In dielectric ...
The UVISEL+ RM extends the capability of the UVISEL with an independent Reflectometry Module (RM). The RM module is available as an option or an upgrade for current models of the VISible and NIR ...
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